Preparation of lamellae for tem viewing

A method and apparatus for producing thin lamella for TEM observation. The steps of the method are robust and can be used to produce lamella in an automated process. In some embodiments, a protective coating have a sputtering rate matched to the sputtering rate of the work piece is deposited before...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ROUTH JR BRIAN ROBERTS, FULLER SCOTT EDWARD, MORIARTY MICHAEL
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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