Method, device and system for debugging silicon wafer conveying position in process chamber

The invention discloses a method, device and system for debugging a silicon wafer conveying position in a process chamber. The method comprises the steps that a sensor detection device and a debugging silicon wafer are arranged; the sensor detection device controls a mechanical arm to hold the debugging silicon wafer to enter the process chamber and move the debugging silicon wafer to a preset silicon wafer conveying position on a static chuck of the process chamber; the sensor detection device detects the horizontal position of the debugging silicon wafer and adjusts the silicon wafer conveying position to meet a preset requirement according to a detection result; the sensor detection device records and stores parameters of the adjusted silicon wafer conveying position and controls the mechanical arm to retreat from the process chamber. According to the method, device and system for debugging the silicon wafer conveying position in the process chamber, the positioning debugging of the silicon wafer conveying position in the process chamber is automatically completed through the sensor detection device, manual adjustment is not needed, the positioning accuracy is improved, and manpower and time are saved.