Emitter, gas field ionization ion source, and ion beam device
To provide an ion source emitter minute in variation of extraction voltages even after regeneration processing at an apex section has been repeatedly performed. In an emitter according to the present invention, a tip has a triangular pyramid shape including an apex of a monoatom, and a shape of the...
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| Hauptverfasser: | , , |
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | To provide an ion source emitter minute in variation of extraction voltages even after regeneration processing at an apex section has been repeatedly performed. In an emitter according to the present invention, a tip has a triangular pyramid shape including an apex of a monoatom, and a shape of the tip viewed from the apex side is substantially hexagonal. |
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