Temperature compensation in a cmut device

CMUT devices are used in many applications e.g. for ultrasound imaging and pressure measurement. These devices operate by sensing a change in capacitance caused by deflection of a membrane comprising one of a pair of electrodes in the device by ultrasound exposure of, or pressure applied on, the mem...

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Bibliographische Detailangaben

Hauptverfasser:	DIRKSEN PETER, LEEUWESTEIN ADRIAAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	FOR PERFORMING MECHANICAL WORK IN GENERAL GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY PERFORMING OPERATIONS TRANSPORTING
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