Automatic controller for MOCVD (Metal-Organic Chemical Vapor Deposition)

The invention discloses an automatic controller for MOCVD (Metal-Organic Chemical Vapor Deposition). The automatic controller is composed of a permission control and management module, a data collection module, a control interface, an equipment interface, an external controller, MOCVD (Metal-Organic...

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Bibliographische Detailangaben
Hauptverfasser:	LIN XIHAN, DENG SHUNDA, YE YIXIU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CRYSTAL GROWTH DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	The invention discloses an automatic controller for MOCVD (Metal-Organic Chemical Vapor Deposition). The automatic controller is composed of a permission control and management module, a data collection module, a control interface, an equipment interface, an external controller, MOCVD (Metal-Organic Chemical Vapor Deposition) equipment, a command execution module, an integrated panel and a program control module, and is characterized in that the control interface is arranged at the upper side of one end of the integrated panel; the equipment interface is arranged at the lower side of the control interface; the data collection module is arranged at the upper part of one side of the integrated panel; the program control module is arranged at the lower part of one side of the integrated panel; the permission control and management module is arranged at the upper part of the other side of the integrated panel; the command execution module is arranged at the lower part of the other side of the integrated panel; th