Large-stroke micro-drive precise two-dimensional worktable

The invention discloses a large-stroke micro-drive precise two-dimensional worktable which is mainly composed of a base, an X-direction feeding device, a Y-direction feeding device and a feeding device top worktable surface, wherein the X-direction feeding device and the Y-direction feeding device a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LI GONGFA, YU ZHEN, TANG QIUHUA, WU ZAIHAO, FANG YI, LI QIAN, WEI GUOQIAN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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