Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium

A substrate transfer apparatus to transfer a circular substrate provided with a cutout at an edge portion thereof, includes: a sensor part including three light source parts applying light to positions different from one another at the edge portion, and three light receiving parts paired with the li...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MAEJIMA HIROMITSU, HAYASHI TOKUTAROU, DOUKI YUICHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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