Mass spectrometer leak detection helium pre-filling method capable of prolonging detection waiting time of sealing device

The invention provides a mass spectrometer leak detection helium pre-filling method capable of prolonging the detection waiting time of a sealing device, is applicable to judging whether the leak rate index of a detected helium pre-filling sealing device is qualified, and belongs to the technical field of vacuum leak detection and instruments. The method has the advantages that the problem that a large leak hole in a molecular flow state cannot be identified by coarse detection due to long detection waiting time is solved, so that the dominant position of the helium pre-filling method is maintained; and by taking a redetection and coarse detection helium pressure method as auxiliary measures of the helium pre-filling method, the minimum detectable equivalent standard leak rate of the helium pre-filling method is lower than that of the helium pressure method by a plurality of orders of magnitude. The invention adopts the technical scheme that various types of judgment trend are analyzed and exhausted, correspo