Terahertz signal detection device
The invention discloses a terahertz signal detection device which comprises an integrated chip. A low-temperature semiconductor reading circuit and a superconductor detector are simultaneously arranged on the integrated chip, the low-temperature semiconductor reading circuit and the superconductor d...
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| creator | KANG LIN HIBI YASUSHI CHEN JIAN XU QINYIN WU PEIHENG |
| description | The invention discloses a terahertz signal detection device which comprises an integrated chip. A low-temperature semiconductor reading circuit and a superconductor detector are simultaneously arranged on the integrated chip, the low-temperature semiconductor reading circuit and the superconductor detector are mutually communicated, and the superconductor detector is used for detecting a terahertz signal. The terahertz signal detection device can not only reduce system noise, and improve sensitivity, working stability and operation speed of a superconductor terahertz direct detector, but also facilitates designing and manufacturing of an imaging system of a terahertz two-dimensional detection array based on a multichannel reading circuit. The terahertz signal detection device can integrate a superconductor component and a semiconductor component on the same chip, and can easily achieve metal thin film wire leading through micromachining technology. Due to the fact that an integration level is improved, a bonding pad is greatly reduced, and therefore, the aims that noise is reduced and systematic operation speed is improved are achieved. |
| format | Patent |
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A low-temperature semiconductor reading circuit and a superconductor detector are simultaneously arranged on the integrated chip, the low-temperature semiconductor reading circuit and the superconductor detector are mutually communicated, and the superconductor detector is used for detecting a terahertz signal. The terahertz signal detection device can not only reduce system noise, and improve sensitivity, working stability and operation speed of a superconductor terahertz direct detector, but also facilitates designing and manufacturing of an imaging system of a terahertz two-dimensional detection array based on a multichannel reading circuit. The terahertz signal detection device can integrate a superconductor component and a semiconductor component on the same chip, and can easily achieve metal thin film wire leading through micromachining technology. 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A low-temperature semiconductor reading circuit and a superconductor detector are simultaneously arranged on the integrated chip, the low-temperature semiconductor reading circuit and the superconductor detector are mutually communicated, and the superconductor detector is used for detecting a terahertz signal. The terahertz signal detection device can not only reduce system noise, and improve sensitivity, working stability and operation speed of a superconductor terahertz direct detector, but also facilitates designing and manufacturing of an imaging system of a terahertz two-dimensional detection array based on a multichannel reading circuit. The terahertz signal detection device can integrate a superconductor component and a semiconductor component on the same chip, and can easily achieve metal thin film wire leading through micromachining technology. Due to the fact that an integration level is improved, a bonding pad is greatly reduced, and therefore, the aims that noise is reduced and systematic operation speed is improved are achieved.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING |
| title | Terahertz signal detection device |
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