Method and device for producing polycrystalline silicon blocks

The invention relates to a device and method for producing a polycrystalline silicon block in a melting crucible which is disposed in a process chamber and filled with silicon material. The silicon material is melted in the melting crucible in order to form a silicon melt and is then cooled to below...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HOESS CHRISTIAN, HUSSY STEPHAN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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