Closed-loop control type accelerometer

The invention discloses a closed-loop control type accelerometer. The closed-loop control type accelerometer comprises a quartz vibrating-beam acceleration sensitive element and an actuator. The surface of a mass block of the quartz vibrating-beam acceleration sensitive element is opposite to the ac...

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Hauptverfasser: LIN BINGTAO, LIN RILE, MAN XIN, LI WENYUN, XU ZHOU, ZHOU QIAN, ZHAO JIANHUA, WENG BANGYING, DONG HONGKUI, XIE JIAWEI, ZHANG QIAOYUN
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creator LIN BINGTAO
LIN RILE
MAN XIN
LI WENYUN
XU ZHOU
ZHOU QIAN
ZHAO JIANHUA
WENG BANGYING
DONG HONGKUI
XIE JIAWEI
ZHANG QIAOYUN
description The invention discloses a closed-loop control type accelerometer. The closed-loop control type accelerometer comprises a quartz vibrating-beam acceleration sensitive element and an actuator. The surface of a mass block of the quartz vibrating-beam acceleration sensitive element is opposite to the actuator and provided with an actuating electrode couple. The actuating electrode couple is used for changing the position of the mass block through adjusting the voltage which is applied between the actuating electrode couple. The actuator comprises a clamping beam, a board-shaped block, a supporting beam which connects the clamping beam and the board-shaped block, and an actuating electrode which is coated on the board-shaped block to produce actuating acting force. When acceleration is input, the mass block deviates from an equilibrium position and cause a change of vibrating frequency of a vibrating beam, the change is detected and the voltage between the corresponding actuating electrode couple is adjusted , and
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subjects INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
PHYSICS
TESTING
title Closed-loop control type accelerometer
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