Bearing platform

The invention discloses a bearing platform. Fastening parts are used to enable fixed parts to be in a relatively firm state, or the fixed parts and a positioning device are fixed together, so that the problem of wafer damages caused by position changes of the positioning device caused by looseness o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HUA LIANG, BAO ZHONGCHENG, CHEN CHAO, HUA JUNJIE
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The invention discloses a bearing platform. Fastening parts are used to enable fixed parts to be in a relatively firm state, or the fixed parts and a positioning device are fixed together, so that the problem of wafer damages caused by position changes of the positioning device caused by looseness of the fixed parts due to frequent handling of goods in the prior art is avoided; and adoption of the fixed parts can nip in the bud, so that waste of manpower and material resources can be avoided, and working efficiency of the bearing platform is greatly improved.