Substrate frame suction apparatus and control method for the same

The invention relates to a substrate frame suction apparatus and a control method for the same. In one embodiment, a substrate frame suction apparatus includes a body having at least one top-side opened chamber, a suction plate to cover a top of the at least one chamber, and a pressure adjustment de...

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1. Verfasser:	PARK YONMOOK
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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