Substrate frame suction apparatus and control method for the same

Substrate frame suction apparatus and control method for the same

The invention relates to a substrate frame suction apparatus and a control method for the same. In one embodiment, a substrate frame suction apparatus includes a body having at least one top-side opened chamber, a suction plate to cover a top of the at least one chamber, and a pressure adjustment de...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: PARK YONMOOK
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:The invention relates to a substrate frame suction apparatus and a control method for the same. In one embodiment, a substrate frame suction apparatus includes a body having at least one top-side opened chamber, a suction plate to cover a top of the at least one chamber, and a pressure adjustment device connected to the at least one chamber and configured to adjust a pressure in the at least one chamber.