Method for preparing thin-film solar cell p-n junction

The invention discloses a method for preparing a thin-film solar cell p-n junction. The method includes the following steps of cleaning a substrate, drying the substrate by nitrogen, placing the substrate on a substrate table in a cavity of a plasma chemical vapor deposition system, placing a raw ma...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG MANXING, CHENG LILI, LIU MINGHAI, WANG SHICAI
Format: Patent
Sprache:chi ; eng
Schlagworte:
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