Movable narrow crack blade

Movable narrow crack blade

The invention brings forward a movable narrow crack blade, which is used to form an exposure field size of a mask aligner. The movable narrow crack blade comprises a light-passing plate and a light absorption plate along the incident light direction. The light-passing plate is used for conducting in...

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1. Verfasser: CAO CHANGZHI
Format: Patent
Sprache:chi ; eng
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APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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creator CAO CHANGZHI
description The invention brings forward a movable narrow crack blade, which is used to form an exposure field size of a mask aligner. The movable narrow crack blade comprises a light-passing plate and a light absorption plate along the incident light direction. The light-passing plate is used for conducting incident light and the light absorption plate is used for absorbing incident light. A reflection prism is also arranged at the side of the light-passing plate and the light absorption plate. There is spacing between the reflection prism and the light-passing plate, reflecting the incident light into the light-passing plate and the light absorption plate. The movable narrow crack blade provided by the invention has advantages of position accuracy and adjustable performance, will not influence exposure precision, and has high maintainability.
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The movable narrow crack blade comprises a light-passing plate and a light absorption plate along the incident light direction. The light-passing plate is used for conducting incident light and the light absorption plate is used for absorbing incident light. A reflection prism is also arranged at the side of the light-passing plate and the light absorption plate. There is spacing between the reflection prism and the light-passing plate, reflecting the incident light into the light-passing plate and the light absorption plate. The movable narrow crack blade provided by the invention has advantages of position accuracy and adjustable performance, will not influence exposure precision, and has high maintainability.</abstract><oa>free_for_read</oa></addata></record>
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language chi ; eng
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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
title Movable narrow crack blade
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