Calibration method of monochromator in spectroscopic ellipsometer

The invention relates to the technical field of spectroscopic ellipsometers, in particular to a calibration method of a monochromator in a spectroscopic ellipsometer. The calibration method comprises the steps of: placing an analyzer and a standard quartz wave plate in a light path and determining p...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YAN KEZHU, HAO DIANZHONG, XIA YUNJIE, WEI LIMEI, HAN PEIGAO, SONG LIANKE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING
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