Calibration method of monochromator in spectroscopic ellipsometer
The invention relates to the technical field of spectroscopic ellipsometers, in particular to a calibration method of a monochromator in a spectroscopic ellipsometer. The calibration method comprises the steps of: placing an analyzer and a standard quartz wave plate in a light path and determining p...
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| creator | YAN KEZHU HAO DIANZHONG XIA YUNJIE WEI LIMEI HAN PEIGAO SONG LIANKE |
| description | The invention relates to the technical field of spectroscopic ellipsometers, in particular to a calibration method of a monochromator in a spectroscopic ellipsometer. The calibration method comprises the steps of: placing an analyzer and a standard quartz wave plate in a light path and determining positions; removing the analyzer, setting a polarizing direction, scanning an ellipsometric spectrum of a waveband required to be calibrated to obtain phase difference dispersion curves of the standard quartz wave plate in a P direction and an S direction, comparing the phase difference dispersion curves with theoretical phase difference dispersion curves in the P direction and the S direction under the same conditions, and finally calibrating actual wavelength to theoretical wavelength to realize the calibration of wavelength of the monochromator in the spectroscopic ellipsometer. Since the calibration method provided by the invention uses the phase difference dispersion principle of the transmitted spectrum of the |
| format | Patent |
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The calibration method comprises the steps of: placing an analyzer and a standard quartz wave plate in a light path and determining positions; removing the analyzer, setting a polarizing direction, scanning an ellipsometric spectrum of a waveband required to be calibrated to obtain phase difference dispersion curves of the standard quartz wave plate in a P direction and an S direction, comparing the phase difference dispersion curves with theoretical phase difference dispersion curves in the P direction and the S direction under the same conditions, and finally calibrating actual wavelength to theoretical wavelength to realize the calibration of wavelength of the monochromator in the spectroscopic ellipsometer. 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The calibration method comprises the steps of: placing an analyzer and a standard quartz wave plate in a light path and determining positions; removing the analyzer, setting a polarizing direction, scanning an ellipsometric spectrum of a waveband required to be calibrated to obtain phase difference dispersion curves of the standard quartz wave plate in a P direction and an S direction, comparing the phase difference dispersion curves with theoretical phase difference dispersion curves in the P direction and the S direction under the same conditions, and finally calibrating actual wavelength to theoretical wavelength to realize the calibration of wavelength of the monochromator in the spectroscopic ellipsometer. Since the calibration method provided by the invention uses the phase difference dispersion principle of the transmitted spectrum of the</description><subject>COLORIMETRY</subject><subject>MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>RADIATION PYROMETRY</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2012</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyjEKAjEQBdA0FqLeYTyAoAbZegmKlZX9EuMsO5Dkh8zcHy08gNVr3tqNIWZ59WiCSoVtwZswU0FFWjpKNHSSSto4WYcmNEnEOUtTfD_3rVvNMSvvfm7c_nZ9hvuBGybWFhNXtik8Tsfz4C_eD6P_53wAalwymQ</recordid><startdate>20121017</startdate><enddate>20121017</enddate><creator>YAN KEZHU</creator><creator>HAO DIANZHONG</creator><creator>XIA YUNJIE</creator><creator>WEI LIMEI</creator><creator>HAN PEIGAO</creator><creator>SONG LIANKE</creator><scope>EVB</scope></search><sort><creationdate>20121017</creationdate><title>Calibration method of monochromator in spectroscopic ellipsometer</title><author>YAN KEZHU ; HAO DIANZHONG ; XIA YUNJIE ; WEI LIMEI ; HAN PEIGAO ; SONG LIANKE</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN102735337A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2012</creationdate><topic>COLORIMETRY</topic><topic>MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>RADIATION PYROMETRY</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>YAN KEZHU</creatorcontrib><creatorcontrib>HAO DIANZHONG</creatorcontrib><creatorcontrib>XIA YUNJIE</creatorcontrib><creatorcontrib>WEI LIMEI</creatorcontrib><creatorcontrib>HAN PEIGAO</creatorcontrib><creatorcontrib>SONG LIANKE</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>YAN KEZHU</au><au>HAO DIANZHONG</au><au>XIA YUNJIE</au><au>WEI LIMEI</au><au>HAN PEIGAO</au><au>SONG LIANKE</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Calibration method of monochromator in spectroscopic ellipsometer</title><date>2012-10-17</date><risdate>2012</risdate><abstract>The invention relates to the technical field of spectroscopic ellipsometers, in particular to a calibration method of a monochromator in a spectroscopic ellipsometer. 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| subjects | COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING |
| title | Calibration method of monochromator in spectroscopic ellipsometer |
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