Substrate, method for exposure of substrate to light, and photo-alignment treatment method

Disclosed are: a substrate in which all of regions to be exposed to light can be irradiated with a light energy with high accuracy; and a light exposure method. Using a light exposure device (5) that is equipped with multiple light exposure units (52) each comprising a light source (521) and a mask...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: HIRAKO TAKAHIRO
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator HIRAKO TAKAHIRO
description Disclosed are: a substrate in which all of regions to be exposed to light can be irradiated with a light energy with high accuracy; and a light exposure method. Using a light exposure device (5) that is equipped with multiple light exposure units (52) each comprising a light source (521) and a mask (522) having, formed therein, a light-transmissive pattern (5221) that can transmit a light energy emitted from the light source (521), a substrate (1) is irradiated with the light energy through the light-transmissive pattern (5221) formed in the mask (522) while moving the substrate (1) and the light exposure units (52) relatively to each other. At the same time, in one of the light exposure units (52) in which the mask (522) straddles a display region (11a) having a predetermined size and a display region (11b) having a different size from the predetermined size, both the display region (11a) having the predetermined size and the display region (11b) having the different size are irradiated with the light energy
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN102725680A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN102725680A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN102725680A3</originalsourceid><addsrcrecordid>eNrjZIgKLk0qLilKLEnVUchNLcnIT1FIyy9SSK0oyC8uLUpVyE9TKIapUCjJV8jJTM8o0VFIzEtRKMjIL8nXTQSK5OWm5pUolBSlJpaAWRCDeBhY0xJzilN5oTQ3g6Kba4izh25qQX58anFBYnJqXmpJvLOfoYGRuZGpmYWBozExagA9PTtC</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Substrate, method for exposure of substrate to light, and photo-alignment treatment method</title><source>esp@cenet</source><creator>HIRAKO TAKAHIRO</creator><creatorcontrib>HIRAKO TAKAHIRO</creatorcontrib><description>Disclosed are: a substrate in which all of regions to be exposed to light can be irradiated with a light energy with high accuracy; and a light exposure method. Using a light exposure device (5) that is equipped with multiple light exposure units (52) each comprising a light source (521) and a mask (522) having, formed therein, a light-transmissive pattern (5221) that can transmit a light energy emitted from the light source (521), a substrate (1) is irradiated with the light energy through the light-transmissive pattern (5221) formed in the mask (522) while moving the substrate (1) and the light exposure units (52) relatively to each other. At the same time, in one of the light exposure units (52) in which the mask (522) straddles a display region (11a) having a predetermined size and a display region (11b) having a different size from the predetermined size, both the display region (11a) having the predetermined size and the display region (11b) having the different size are irradiated with the light energy</description><language>chi ; eng</language><subject>ADVERTISING ; APPARATUS SPECIALLY ADAPTED THEREFOR ; CINEMATOGRAPHY ; CRYPTOGRAPHY ; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ; DISPLAY ; DISPLAYING ; EDUCATION ; ELECTROGRAPHY ; FREQUENCY-CHANGING ; HOLOGRAPHY ; LABELS OR NAME-PLATES ; MATERIALS THEREFOR ; NON-LINEAR OPTICS ; OPTICAL ANALOGUE/DIGITAL CONVERTERS ; OPTICAL LOGIC ELEMENTS ; OPTICS ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS ; SEALS ; SIGNS ; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF</subject><creationdate>2012</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20121010&amp;DB=EPODOC&amp;CC=CN&amp;NR=102725680A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20121010&amp;DB=EPODOC&amp;CC=CN&amp;NR=102725680A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>HIRAKO TAKAHIRO</creatorcontrib><title>Substrate, method for exposure of substrate to light, and photo-alignment treatment method</title><description>Disclosed are: a substrate in which all of regions to be exposed to light can be irradiated with a light energy with high accuracy; and a light exposure method. Using a light exposure device (5) that is equipped with multiple light exposure units (52) each comprising a light source (521) and a mask (522) having, formed therein, a light-transmissive pattern (5221) that can transmit a light energy emitted from the light source (521), a substrate (1) is irradiated with the light energy through the light-transmissive pattern (5221) formed in the mask (522) while moving the substrate (1) and the light exposure units (52) relatively to each other. At the same time, in one of the light exposure units (52) in which the mask (522) straddles a display region (11a) having a predetermined size and a display region (11b) having a different size from the predetermined size, both the display region (11a) having the predetermined size and the display region (11b) having the different size are irradiated with the light energy</description><subject>ADVERTISING</subject><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>CINEMATOGRAPHY</subject><subject>CRYPTOGRAPHY</subject><subject>DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING</subject><subject>DISPLAY</subject><subject>DISPLAYING</subject><subject>EDUCATION</subject><subject>ELECTROGRAPHY</subject><subject>FREQUENCY-CHANGING</subject><subject>HOLOGRAPHY</subject><subject>LABELS OR NAME-PLATES</subject><subject>MATERIALS THEREFOR</subject><subject>NON-LINEAR OPTICS</subject><subject>OPTICAL ANALOGUE/DIGITAL CONVERTERS</subject><subject>OPTICAL LOGIC ELEMENTS</subject><subject>OPTICS</subject><subject>ORIGINALS THEREFOR</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><subject>SEALS</subject><subject>SIGNS</subject><subject>TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2012</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZIgKLk0qLilKLEnVUchNLcnIT1FIyy9SSK0oyC8uLUpVyE9TKIapUCjJV8jJTM8o0VFIzEtRKMjIL8nXTQSK5OWm5pUolBSlJpaAWRCDeBhY0xJzilN5oTQ3g6Kba4izh25qQX58anFBYnJqXmpJvLOfoYGRuZGpmYWBozExagA9PTtC</recordid><startdate>20121010</startdate><enddate>20121010</enddate><creator>HIRAKO TAKAHIRO</creator><scope>EVB</scope></search><sort><creationdate>20121010</creationdate><title>Substrate, method for exposure of substrate to light, and photo-alignment treatment method</title><author>HIRAKO TAKAHIRO</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN102725680A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2012</creationdate><topic>ADVERTISING</topic><topic>APPARATUS SPECIALLY ADAPTED THEREFOR</topic><topic>CINEMATOGRAPHY</topic><topic>CRYPTOGRAPHY</topic><topic>DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING</topic><topic>DISPLAY</topic><topic>DISPLAYING</topic><topic>EDUCATION</topic><topic>ELECTROGRAPHY</topic><topic>FREQUENCY-CHANGING</topic><topic>HOLOGRAPHY</topic><topic>LABELS OR NAME-PLATES</topic><topic>MATERIALS THEREFOR</topic><topic>NON-LINEAR OPTICS</topic><topic>OPTICAL ANALOGUE/DIGITAL CONVERTERS</topic><topic>OPTICAL LOGIC ELEMENTS</topic><topic>OPTICS</topic><topic>ORIGINALS THEREFOR</topic><topic>PHOTOGRAPHY</topic><topic>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</topic><topic>PHYSICS</topic><topic>SEALS</topic><topic>SIGNS</topic><topic>TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF</topic><toplevel>online_resources</toplevel><creatorcontrib>HIRAKO TAKAHIRO</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>HIRAKO TAKAHIRO</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Substrate, method for exposure of substrate to light, and photo-alignment treatment method</title><date>2012-10-10</date><risdate>2012</risdate><abstract>Disclosed are: a substrate in which all of regions to be exposed to light can be irradiated with a light energy with high accuracy; and a light exposure method. Using a light exposure device (5) that is equipped with multiple light exposure units (52) each comprising a light source (521) and a mask (522) having, formed therein, a light-transmissive pattern (5221) that can transmit a light energy emitted from the light source (521), a substrate (1) is irradiated with the light energy through the light-transmissive pattern (5221) formed in the mask (522) while moving the substrate (1) and the light exposure units (52) relatively to each other. At the same time, in one of the light exposure units (52) in which the mask (522) straddles a display region (11a) having a predetermined size and a display region (11b) having a different size from the predetermined size, both the display region (11a) having the predetermined size and the display region (11b) having the different size are irradiated with the light energy</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language chi ; eng
recordid cdi_epo_espacenet_CN102725680A
source esp@cenet
subjects ADVERTISING
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
CRYPTOGRAPHY
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING
DISPLAY
DISPLAYING
EDUCATION
ELECTROGRAPHY
FREQUENCY-CHANGING
HOLOGRAPHY
LABELS OR NAME-PLATES
MATERIALS THEREFOR
NON-LINEAR OPTICS
OPTICAL ANALOGUE/DIGITAL CONVERTERS
OPTICAL LOGIC ELEMENTS
OPTICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEALS
SIGNS
TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
title Substrate, method for exposure of substrate to light, and photo-alignment treatment method
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-13T02%3A58%3A00IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=HIRAKO%20TAKAHIRO&rft.date=2012-10-10&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ECN102725680A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true