Method for improving anisotropic magnetoresistance sensitivity by using surfactant

The invention discloses a method for improving anisotropic magnetoresistance sensitivity by using a surfactant, relating to the field of magnetic film materials. The method disclosed by the invention comprises the following steps of: sequentially depositing tantalum Ta (50-100A)/aluminium oxide Al2O...

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Bibliographische Detailangaben
Hauptverfasser: DING LEI, WEI YAOLI, XIANG DAOPING, YU GUANGHUA
Format: Patent
Sprache:chi ; eng
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