High purity nitrogen device

The invention provides a high purity nitrogen device which comprises three parts including a raw material air compressor, a prepurification device and a fractionating tower system, wherein the raw material air compressor, the prepurification device and the fractionating tower system respectively com...

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Bibliographische Detailangaben
1. Verfasser: LIN XUFEI
Format: Patent
Sprache:chi ; eng
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