Optical measuring apparatus and optical measuring method

Optical measuring apparatus and optical measuring method

The present invention provides an optical measuring apparatus and an optical measuring method, which can not only measure (calculate) the full reflected light of a sample, but also independently measure (calculate) reflection characteristics such as scattered reflected light and reflection haze degr...

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1. Verfasser: HAMADA MOTOAKI
Format: Patent
Sprache:chi ; eng
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INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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creator HAMADA MOTOAKI
description The present invention provides an optical measuring apparatus and an optical measuring method, which can not only measure (calculate) the full reflected light of a sample, but also independently measure (calculate) reflection characteristics such as scattered reflected light and reflection haze degree, etc., and also can calculate the film thickness of the sample through using the characteristics. The optical measuring apparatus comprises a first reflected light measuring optical system (3) performing light condensing on the full reflected light using an integrating sphere (2); a second reflected light measuring optical system (3) performing light condensing on the scattered reflected light using the integrating sphere (2); and a detection optical system (7) performing detection on condensed light using the integrating sphere (2). Based on the full reflected light obtained through the first refelction light measuring optical system (3) and the detection optical system (7) and the scattered reflected light obt
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The optical measuring apparatus comprises a first reflected light measuring optical system (3) performing light condensing on the full reflected light using an integrating sphere (2); a second reflected light measuring optical system (3) performing light condensing on the scattered reflected light using the integrating sphere (2); and a detection optical system (7) performing detection on condensed light using the integrating sphere (2). 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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
title Optical measuring apparatus and optical measuring method
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