Electrostatically actuated micro-mechanical switching device

The present invention relates to an electrostatically actuated micro-mechanical switching device (1) with movable elements formed in the bulk of a substrate (15) for closing and releasing at least one Ohmic contact by a horizontal movement of the movable elements in a plane of the substrate (15); th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GESSNER THOMAS, LEIDICH STEFAN, NOWACK MARKUS, IKEDA KOICHI, KURTH STEFFEN, AKIBA AKIRA, FROEEMEL JOEERG, KAUFMANN CHRISTIAN, BERTZ ANDREAS
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SWITCHES ELECTRICITY EMERGENCY PROTECTIVE DEVICES RELAYS SELECTORS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!