Vacuum pumping device, vacuum processing device, and vacuum processing method

Vacuum pumping device, vacuum processing device, and vacuum processing method

Provided are a vacuum pumping device, a vacuum processing device, and a vacuum pumping method capable of preventing accumulation of ozone in a cryopump. A vacuum processing device (1) pertaining to an embodiment of the invention is equipped with a processing chamber (11) for vacuum processing, a pum...

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Hauptverfasser: ASARI SHIN, OSONO SHUJI, FURUYA SHINJI, KOMURO TAKU, SAITO KAZUYA, MASUDA YUKIO
Format: Patent
Sprache:chi ; eng
Schlagworte:
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
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creator ASARI SHIN
OSONO SHUJI
FURUYA SHINJI
KOMURO TAKU
SAITO KAZUYA
MASUDA YUKIO
description Provided are a vacuum pumping device, a vacuum processing device, and a vacuum pumping method capable of preventing accumulation of ozone in a cryopump. A vacuum processing device (1) pertaining to an embodiment of the invention is equipped with a processing chamber (11) for vacuum processing, a pump unit for exhausting the processing chamber (11), and a heating unit (20). The pump unit has a cold trap (161) capable of collecting the exhaust gas and an exhaust pathway (13A) for leading the exhaust gas from the processing chamber (11) to the cold trap (161). The heating unit (20) pyrolyzes ozone contained in the exhaust gas while it is in the exhaust pathway (13A) on the way to the cold trap (161) from the processing chamber (11).
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subjects BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
title Vacuum pumping device, vacuum processing device, and vacuum processing method
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