Method for preparing high-density zinc oxide nano granules

The invention relates to a method for preparing high-density zinc oxide nano granules. In the method, the high-density zinc oxide nano granules are grown by using diethyl zinc steam diluted by inert gas and steam of aqueous solution of hydrogen peroxide as reaction precursors, adopting an atomic lay...

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Bibliographische Detailangaben
Hauptverfasser:	DING SHIJIN, QIAN KEJIA, ZHANG WEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F CRYSTAL GROWTH DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OFSOLID INORGANIC COMPOUNDS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES METALLURGY NANOTECHNOLOGY PERFORMING OPERATIONS PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEMICONDUCTOR DEVICES SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	The invention relates to a method for preparing high-density zinc oxide nano granules. In the method, the high-density zinc oxide nano granules are grown by using diethyl zinc steam diluted by inert gas and steam of aqueous solution of hydrogen peroxide as reaction precursors, adopting an atomic layer deposition mode and using atomic layer deposition equipment, wherein the diethyl zinc steam and the steam of the aqueous solution of the hydrogen peroxide, serving as the reaction precursors, are alternately introduced into a reaction cavity in a pulse mode, and the two kinds of steam are blown and washed by using inert gas. The high-density zinc oxide nano granules are grown by using an atomic layer deposition technology, so the process is simple, and the production cost is low; the size of the nano granules can be accurately controlled; the zinc oxide nano granules with average diameter of about 5 to 25 nanometers, height of 2 to 10 nanometers and density of 1.010 to 1.010 cm can be obtained; and the zin