Micro-electromechanical system microphone

A capacitive micro-electromechanical system (MEMS) microphone includes a semiconductor substrate having an opening that extends through the substrate. The microphone has a membrane that extends across the opening and a back-plate that extends across the opening. The membrane is configured to generat...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GERT LANGRAYS, BOMINAAR-SILKENS IRIS, FELBERER FRANZ, PIJNENBURG REMCO HENRICUS WILHELMUS, VAN LIPPEN TWAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS PUBLIC ADDRESS SYSTEMS
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