Thin film detector for presence detection
A transducer (800) is provided where a membrane (830) is formed over a front substrate (615); and a piezoelectric layer (820) is formed over the membrane (830) at an active portion (821) and peripheral portions located adjacent the active portion (821). A patterned conductive layer including first a...
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| creator | BOOTS HENRI M. J RENDERS CHRISTINA A WUNNICKE OLAF DIRKSEN PETER SREEDHARAN NAIR BIJU K DE WILD MARCO KLEE MAREIKE DEKKER RONALD BREEN REMCO A. H DELNOIJ ROGER P. A MAUCZOK RUEDIGER VAN HEESCH CHRIS PASVEER WILLEM F REEFMAN DERK VAN ESCH HARRY REIMANN KLAUS KNIBBE ENGEL J |
| description | A transducer (800) is provided where a membrane (830) is formed over a front substrate (615); and a piezoelectric layer (820) is formed over the membrane (830) at an active portion (821) and peripheral portions located adjacent the active portion (821). A patterned conductive layer including first and second electrodes (840, 845) is formed over the piezoelectric layer (820). Further, a back substrate structure is provided having supports (822, 824) located at the peripheral portions adjacent the active portion (821). The height (826) of the supports (822, 824) is greater than a combined height (828) of the patterned piezoelectric layer and the patterned conductive layer. Many transducers may be connected to form an array, where a controller may be provided for controlling the array, such as steering a beam of the array, and processing signals received by the array, for presence or motion detection and/or imaging, for example. |
| format | Patent |
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J</au><au>RENDERS CHRISTINA A</au><au>WUNNICKE OLAF</au><au>DIRKSEN PETER</au><au>SREEDHARAN NAIR BIJU K</au><au>DE WILD MARCO</au><au>KLEE MAREIKE</au><au>DEKKER RONALD</au><au>BREEN REMCO A. H</au><au>DELNOIJ ROGER P. A</au><au>MAUCZOK RUEDIGER</au><au>VAN HEESCH CHRIS</au><au>PASVEER WILLEM F</au><au>REEFMAN DERK</au><au>VAN ESCH HARRY</au><au>REIMANN KLAUS</au><au>KNIBBE ENGEL J</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Thin film detector for presence detection</title><date>2010-12-15</date><risdate>2010</risdate><abstract>A transducer (800) is provided where a membrane (830) is formed over a front substrate (615); and a piezoelectric layer (820) is formed over the membrane (830) at an active portion (821) and peripheral portions located adjacent the active portion (821). A patterned conductive layer including first and second electrodes (840, 845) is formed over the piezoelectric layer (820). Further, a back substrate structure is provided having supports (822, 824) located at the peripheral portions adjacent the active portion (821). The height (826) of the supports (822, 824) is greater than a combined height (828) of the patterned piezoelectric layer and the patterned conductive layer. Many transducers may be connected to form an array, where a controller may be provided for controlling the array, such as steering a beam of the array, and processing signals received by the array, for presence or motion detection and/or imaging, for example.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | ELECTRICITY FOR PERFORMING MECHANICAL WORK IN GENERAL GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY PERFORMING OPERATIONS TRANSPORTING |
| title | Thin film detector for presence detection |
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