Trench-type Schottky-barrier diode rectifier and preparation method

Trench-type Schottky-barrier diode rectifier and preparation method

The invention provides a trench-type Schottky-barrier diode rectifier and a preparation method. By using the two shoulders of a conducting poly-silicon T-shaped head in the trench and the silica layers on the extended sections to cover the vertex angles of boss structures on two sides of the trench,...

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Hauptverfasser: WANG FAN, LIU WEI, CHENG YICHUAN
Format: Patent
Sprache:chi ; eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator WANG FAN
LIU WEI
CHENG YICHUAN
description The invention provides a trench-type Schottky-barrier diode rectifier and a preparation method. By using the two shoulders of a conducting poly-silicon T-shaped head in the trench and the silica layers on the extended sections to cover the vertex angles of boss structures on two sides of the trench, the invention, based on the existing trench-type Schottky diode rectifiers, overcomes the problemsof increase in inverse current leakage and reduction in inverse blocking capacity caused by the tip discharge effect produced by contact of the vertex angles of the boss and an upper metal layer; moreover, by filling the trench with the conducting poly-silicon instead of aluminum, titanium and other conventional materials of the upper metal layer, on one hand, the invention solves the problem that the reliability of the rectifier is influenced by hollow cavities left during trench filling, and on the other hand, the invention provides more flexible design space for the ratio of the opening width to depth of the trench
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Trench-type Schottky-barrier diode rectifier and preparation method
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