Pre-oxidation method of semiconductor packaging and routing surface and pre-oxidation layer structure thereof

Pre-oxidation method of semiconductor packaging and routing surface and pre-oxidation layer structure thereof

The invention discloses a pre-oxidation method of a semiconductor packaging and routing surface and a pre-oxidation layer structure thereof. The pre-oxidation method comprises the following steps of: providing a lead and a routing joint surface, wherein one end of the lead is welded and combined to...

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Hauptverfasser: WANG DEJUN, LU DAILIE, DU JIAQIN
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator WANG DEJUN
LU DAILIE
DU JIAQIN
description The invention discloses a pre-oxidation method of a semiconductor packaging and routing surface and a pre-oxidation layer structure thereof. The pre-oxidation method comprises the following steps of: providing a lead and a routing joint surface, wherein one end of the lead is welded and combined to the routing joint surface to form a routing and combining part; providing an oxidizing gas for the routing and combining part to ensure that a pre-oxidation layer is formed on the routing joint surface on the routing and combining part and/or the surface of the lead; and packaging the lead, the routing joint surface, the pre-oxidation layer and the routing and combining part by utilizing a sealing glue material. Because the routing joint surface and/or the surface of the lead have/has the pre-oxidation layer, when the packaging procedure is carried out, the pre-oxidation layer can prevent the lead and/or the routing joint surface from being corroded, so that the risk of generating oxidation defects in the packaging
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Pre-oxidation method of semiconductor packaging and routing surface and pre-oxidation layer structure thereof
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