Substrate supporting apparatus, substrate processing apparatus and substrate supporting method

Productivity is improved by ensuring reliability of palette holding and reliability of operations. A substrate supporting apparatus includes a palette (8) on which a substrate (12) is mounted, a palette double-end holding mechanism holding both ends in a diameter direction of the palette while the palette is in a vertical posture, a palette center holding mechanism (13) rotatably holding a centersection of the palette, and a moving mechanism (11) moving an apparatus body, wherein the palette double-end holding mechanism is a mechanism that grips the both ends in the diameter direction of thepalette from both sides of a thickness direction, the palette double-end holding mechanism holds the palette during movement, the palette is held by both of the holding mechanisms during delivery from the palette double-end holding mechanism to the palette center holding mechanism, and the palette center holding mechanism rotatably holds the center section of the palette and holding by the palette double-end holding mechan