Optical fiber point diffraction phase shift interferometry method of surface shape of large relative aperture sphere

Optical fiber point diffraction phase shift interferometry method of surface shape of large relative aperture sphere

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Hauptverfasser: CHEN LINGFENG, LI JIE, ZHOU TAOGENG, REN YAQING, ZHANG XUSHENG, HE CHUAN
Format: Patent
Sprache:chi ; eng
Schlagworte:
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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LI JIE
ZHOU TAOGENG
REN YAQING
ZHANG XUSHENG
HE CHUAN
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subjects MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
title Optical fiber point diffraction phase shift interferometry method of surface shape of large relative aperture sphere
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