Method and device for detecting micro foreign matter within transparent plate

A light-blocking micro foreign matter within a transparent plate, if any, is stably detected and information on the depth of the micro foreign matter is acquired. A method is used for detecting a micro foreign matter (4), if any, present in a transparent plate (1) having a uniform index of refractio...

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Bibliographische Detailangaben
1. Verfasser: OTO KIMIAKI
Format: Patent
Sprache:chi ; eng
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