Error detecting system of minitype high accuracy three coordinate measuring machine
The invention relates to an error detecting system of a minitype high accuracy three-coordinate measuring machine, which is characterized by comprising an X/Y axis target lens, an optical transition target lens, a Z axis target lens, a vertical edge laser interferometer having optical axis being par...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to an error detecting system of a minitype high accuracy three-coordinate measuring machine, which is characterized by comprising an X/Y axis target lens, an optical transition target lens, a Z axis target lens, a vertical edge laser interferometer having optical axis being parallel to X axis direction and a transverse edge laser interferometer having optical axis being parallel to Y axis direction. The error detecting system is synchronously tested by multiple items of high accuracy geometrical error, and can realize nanoscale precision detection for the geometrical error of the three-coordinate measuring machine. Furthermore, the error detecting system has high working efficiency and simple operating way. |
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