Apparatus and method of measuring film thickness

The present invention provides an apparatus and method of measuring film thickness, capable of detecting film thickness of detected objects with birefringence stability and continuously. The film thickness measuring apparatus (1) includes spectrometry part (10) for splitting the reflected light obta...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	NISHIDA KAZUMI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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