Micro electro-mechanical system and manufacturing method therefor
The invention discloses a micro-electromechanical system and the production method thereof. The micro-electromechanical system comprises a micro structure, a circuit, and a ditch positioned between the micro structure and the circuit and used for separating the micro structure from the circuit and p...
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| creator | YE LIKEN QIU YIXIANG |
| description | The invention discloses a micro-electromechanical system and the production method thereof. The micro-electromechanical system comprises a micro structure, a circuit, and a ditch positioned between the micro structure and the circuit and used for separating the micro structure from the circuit and preventing over etching generated when the micro structure is released, and the over etching can cause characteristic deterioration of the circuit. The micro-electromechanical system adopts another technical scheme that the system comprises a structural block provided with at least a micro structure, a circuit block at least provided with a first circuit and a second circuit, as well as a ditch positioned between the first circuit and the second circuit and used for separating the first circuit from the second circuit and avoiding the interference between the first circuit and the second circuit. Because the ditch is formed on a base plate, the invention avoids the interference between the circuits and preventing th |
| format | Patent |
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| language | chi ; eng |
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| subjects | MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING |
| title | Micro electro-mechanical system and manufacturing method therefor |
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