Separation of chlorosilanes

Crude chlorosilane streams containing lower-boiling chlorosilanes and higher-boiling chlorosilanes are separated by contacting them with a distillation aid. The lower-boiling chlorosilanes are separated from the crude chlorosilane stream, and then the distillation aid and the higher-boiling chlorosi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MILLER DAVID CLAY, FLANINGAM ORA L, WINELAND JONATHAN DAVID
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM CHEMISTRY METALLURGY ORGANIC CHEMISTRY
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