Separation of chlorosilanes

Crude chlorosilane streams containing lower-boiling chlorosilanes and higher-boiling chlorosilanes are separated by contacting them with a distillation aid. The lower-boiling chlorosilanes are separated from the crude chlorosilane stream, and then the distillation aid and the higher-boiling chlorosi...

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Hauptverfasser: MILLER DAVID CLAY, FLANINGAM ORA L, WINELAND JONATHAN DAVID
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:Crude chlorosilane streams containing lower-boiling chlorosilanes and higher-boiling chlorosilanes are separated by contacting them with a distillation aid. The lower-boiling chlorosilanes are separated from the crude chlorosilane stream, and then the distillation aid and the higher-boiling chlorosilanes are separated from one another. The distillation aid is a mono-cyano-substituted organic compound, a nitro-substituted organic compound, a mono- cyano-substituted organosilicon compound, a nitro-substituted organosilicon compound, or a mixture thereof. These distillation aids increase the relative volatility of crude chlorosilane streams such as methyltrichlorosilane and dimethyldichlorosilane resulting in improved separation at lower capital and/or fixed costs.