Semi-conductor apparatus and forming method thereof

Disclosed is a semiconductor; wherein a first grid electrode structure comprises a grid dielectric layer which directly contacts with a substrate, a lower electrode arranged on the grid dielectric layer and an upper electrode arranged on the lower electrode; a second grid electrode structure is comp...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MA GUANGHUA, CHENG LIWEI, LIN JIANTING, HUANG YAOCONG, XU ZHEHUA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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