Double-resonance girder type micro mechanical pressure sensor
A bi-resonant beam micromachine pressure sensor mainly comprises sensing membrane, non-sensing area, resonant working beam and resonant compensating beam; the centre of the structure is rectangular sensing membrane for sensing the tested pressure to generate corresponding deformation; the peripheral...
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| creator | LIU GUANGYU TANG ZHANGYANG FAN SHANGCHUN |
| description | A bi-resonant beam micromachine pressure sensor mainly comprises sensing membrane, non-sensing area, resonant working beam and resonant compensating beam; the centre of the structure is rectangular sensing membrane for sensing the tested pressure to generate corresponding deformation; the peripheral part of the sensing membrane is non-sensing area which does not sense the tested pressure; periphery of the sensing membrane is clamped in the inner wall of the non-sensing area; both ends of the resonant working beam are clamped at the centre of upper surface of the sensing membrane to sense the tested pressure so as to change the resonance frequency and obtain the corresponding tested pressure valve through testing the resonance frequency by the closed loop system; both ends of the resonant compensating beam are clamped in the upper surface of the non-sensing area and are parallel to the resonant working beam and have the same physical dimension with the resonant working beam; the resonant compensating beam does |
| format | Patent |
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the centre of the structure is rectangular sensing membrane for sensing the tested pressure to generate corresponding deformation; the peripheral part of the sensing membrane is non-sensing area which does not sense the tested pressure; periphery of the sensing membrane is clamped in the inner wall of the non-sensing area; both ends of the resonant working beam are clamped at the centre of upper surface of the sensing membrane to sense the tested pressure so as to change the resonance frequency and obtain the corresponding tested pressure valve through testing the resonance frequency by the closed loop system; both ends of the resonant compensating beam are clamped in the upper surface of the non-sensing area and are parallel to the resonant working beam and have the same physical dimension with the resonant working beam; the resonant compensating beam does</description><language>chi ; eng</language><subject>MEASURING ; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE ; 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the centre of the structure is rectangular sensing membrane for sensing the tested pressure to generate corresponding deformation; the peripheral part of the sensing membrane is non-sensing area which does not sense the tested pressure; periphery of the sensing membrane is clamped in the inner wall of the non-sensing area; both ends of the resonant working beam are clamped at the centre of upper surface of the sensing membrane to sense the tested pressure so as to change the resonance frequency and obtain the corresponding tested pressure valve through testing the resonance frequency by the closed loop system; both ends of the resonant compensating beam are clamped in the upper surface of the non-sensing area and are parallel to the resonant working beam and have the same physical dimension with the resonant working beam; the resonant compensating beam does</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS TESTING TRANSPORTING |
| title | Double-resonance girder type micro mechanical pressure sensor |
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