Vacuum valve

To provide a vacuum valve with an improved endurance of a bellows, a vacuum valve comprises: a valve section including a first port, a second port, a valve seat provided between the first and second ports, and a valve element movable into or out of contact with the valve seat; an actuator section in...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: ITO SHIN, NAITOH MASAHIRO, IKUJI MICHINORI, IWATA MAKOTO
Format: Patent
Sprache:chi ; eng
Schlagworte:
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