Ceramic multilayer substrate

A ceramic multilayer board which prevents nonuniform deformation without adding a special process. A plurality of stacked ceramic layers and at least one conductor pattern (13, 14) arranged on at least one ceramic layer are provided, and a cavity (12) is formed at least on a first main plane (10a)....

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Bibliographische Detailangaben
1. Verfasser: ISEBO KAZUHIRO
Format: Patent
Sprache:eng
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