Thin film piezoelectric element, producing method and executing element thereof

Two piezoelectric thin films each sandwiched between a main electrode layer and an opposite electrode layer are laminated in pairs so as to form a thin film piezoelectric element. An electrode leading area has a region in which the main electrode layer partially projects from the piezoelectric thin...

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Bibliographische Detailangaben

Hauptverfasser:	UCHIYAMA HIROICHI, YANAGI TERUMI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION
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