Verfahren zum Herstellen eines nichtwasserlöslichen Überzuges aus Germaniumoxyd an der Oberfläche eines Germaniumkristalls

A germanium crystal is provided with a protective layer of tetragonal germanium dioxide by oxidizing its surface by heating in a liquid containing hydroxyl groups under a pressure of at least 5 atmospheres and preferably of 30 atmospheres or more. Suitable liquids include water and alcohol and heati...

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Hauptverfasser:	PAMMER,ERICH,DR, MALY,DIETER
Format:	Patent
Sprache:	ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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