THERMALLY-MATCHED PIEZORESISTIVE ELEMENTS IN BRIDGES

A micromechanical pressure sensor for measuring a pressure differential includes a diaphragm having an inner region and two edge regions, one opposite the other with respect to the inner region. Two or more piezoresistive resistance devices are on the diaphragm, at least one in each of the inner and...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BACKMAN, ROGER ALAN, POTASEK, DAVID P
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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