TURBO MOLECULAR PUMP FOR MASS SPECTROMETER

The invention relates to turbo molecular pumps enabling high pumping speed. The disclosure suggests using one or more cage-like rotor stages to optimize pumping speed on vacuum systems with low gas flows and low ultimate pressures. This allows for a smaller motor as well as smaller overall form fact...

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Hauptverfasser: STEINER, URS, FRANZEN, JOCHEN
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creator STEINER, URS
FRANZEN, JOCHEN
description The invention relates to turbo molecular pumps enabling high pumping speed. The disclosure suggests using one or more cage-like rotor stages to optimize pumping speed on vacuum systems with low gas flows and low ultimate pressures. This allows for a smaller motor as well as smaller overall form factor and makes it well suited, in particular, for compact mass spectrometers and desk-top mass spectrometers.
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subjects BASIC ELECTRIC ELEMENTS
BLASTING
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
HEATING
LIGHTING
MECHANICAL ENGINEERING
NON-POSITIVE DISPLACEMENT PUMPS
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
title TURBO MOLECULAR PUMP FOR MASS SPECTROMETER
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