ETCHING METAL USING N-HETEROCYCLIC CARBENES

An etchant is described that includes an N-heterocyclic carbene and optionally an appropriate solvent. The etchant was effective at etching a metallic surface having, for example, a metal oxide and/or metal, in both solution phase and vapour-phase. The etchant has been shown to effectively etch oxid...

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Hauptverfasser: BADDELEY, CHRISTOPHER J, ALRASHED, ABRAR R.E, MARIAMPILLAI, BRIAN E, HORTON, J. HUGH, LARREA, CHRISTIAN R, CRUDDEN, CATHLEEN M
Format: Patent
Sprache:eng ; fre
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