ETCHING METAL USING N-HETEROCYCLIC CARBENES
An etchant is described that includes an N-heterocyclic carbene and optionally an appropriate solvent. The etchant was effective at etching a metallic surface having, for example, a metal oxide and/or metal, in both solution phase and vapour-phase. The etchant has been shown to effectively etch oxid...
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| creator | BADDELEY, CHRISTOPHER J ALRASHED, ABRAR R.E MARIAMPILLAI, BRIAN E HORTON, J. HUGH LARREA, CHRISTIAN R CRUDDEN, CATHLEEN M |
| description | An etchant is described that includes an N-heterocyclic carbene and optionally an appropriate solvent. The etchant was effective at etching a metallic surface having, for example, a metal oxide and/or metal, in both solution phase and vapour-phase. The etchant has been shown to effectively etch oxidized copper and tungsten.
L'invention concerne un agent de gravure comprenant un carbène N-hétérocyclique et éventuellement un solvant approprié. L'agent de gravure est efficace pour graver une surface métallique ayant, par exemple, un oxyde métallique et/ou un métal, à la fois en phase de solution et en phase vapeur. Il a été démontré que l'agent de gravure peut graver efficacement du cuivre et du tungstène oxydés. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CA3026196A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CA3026196A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CA3026196A13</originalsourceid><addsrcrecordid>eNrjZNB2DXH28PRzV_B1DXH0UQgNBrH9dD1cQ1yD_J0jnX08nRWcHYOcXP1cg3kYWNMSc4pTeaE0N4OCG0i7bmpBfnxqcUFicmpeakm8s6OxgZGZoaWZo6ExEUoAHR4kRQ</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>ETCHING METAL USING N-HETEROCYCLIC CARBENES</title><source>esp@cenet</source><creator>BADDELEY, CHRISTOPHER J ; ALRASHED, ABRAR R.E ; MARIAMPILLAI, BRIAN E ; HORTON, J. HUGH ; LARREA, CHRISTIAN R ; CRUDDEN, CATHLEEN M</creator><creatorcontrib>BADDELEY, CHRISTOPHER J ; ALRASHED, ABRAR R.E ; MARIAMPILLAI, BRIAN E ; HORTON, J. HUGH ; LARREA, CHRISTIAN R ; CRUDDEN, CATHLEEN M</creatorcontrib><description>An etchant is described that includes an N-heterocyclic carbene and optionally an appropriate solvent. The etchant was effective at etching a metallic surface having, for example, a metal oxide and/or metal, in both solution phase and vapour-phase. The etchant has been shown to effectively etch oxidized copper and tungsten.
L'invention concerne un agent de gravure comprenant un carbène N-hétérocyclique et éventuellement un solvant approprié. L'agent de gravure est efficace pour graver une surface métallique ayant, par exemple, un oxyde métallique et/ou un métal, à la fois en phase de solution et en phase vapeur. Il a été démontré que l'agent de gravure peut graver efficacement du cuivre et du tungstène oxydés.</description><language>eng ; fre</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 ; NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE</subject><creationdate>2017</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20171207&DB=EPODOC&CC=CA&NR=3026196A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20171207&DB=EPODOC&CC=CA&NR=3026196A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>BADDELEY, CHRISTOPHER J</creatorcontrib><creatorcontrib>ALRASHED, ABRAR R.E</creatorcontrib><creatorcontrib>MARIAMPILLAI, BRIAN E</creatorcontrib><creatorcontrib>HORTON, J. HUGH</creatorcontrib><creatorcontrib>LARREA, CHRISTIAN R</creatorcontrib><creatorcontrib>CRUDDEN, CATHLEEN M</creatorcontrib><title>ETCHING METAL USING N-HETEROCYCLIC CARBENES</title><description>An etchant is described that includes an N-heterocyclic carbene and optionally an appropriate solvent. The etchant was effective at etching a metallic surface having, for example, a metal oxide and/or metal, in both solution phase and vapour-phase. The etchant has been shown to effectively etch oxidized copper and tungsten.
L'invention concerne un agent de gravure comprenant un carbène N-hétérocyclique et éventuellement un solvant approprié. L'agent de gravure est efficace pour graver une surface métallique ayant, par exemple, un oxyde métallique et/ou un métal, à la fois en phase de solution et en phase vapeur. Il a été démontré que l'agent de gravure peut graver efficacement du cuivre et du tungstène oxydés.</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25</subject><subject>NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2017</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNB2DXH28PRzV_B1DXH0UQgNBrH9dD1cQ1yD_J0jnX08nRWcHYOcXP1cg3kYWNMSc4pTeaE0N4OCG0i7bmpBfnxqcUFicmpeakm8s6OxgZGZoaWZo6ExEUoAHR4kRQ</recordid><startdate>20171207</startdate><enddate>20171207</enddate><creator>BADDELEY, CHRISTOPHER J</creator><creator>ALRASHED, ABRAR R.E</creator><creator>MARIAMPILLAI, BRIAN E</creator><creator>HORTON, J. HUGH</creator><creator>LARREA, CHRISTIAN R</creator><creator>CRUDDEN, CATHLEEN M</creator><scope>EVB</scope></search><sort><creationdate>20171207</creationdate><title>ETCHING METAL USING N-HETEROCYCLIC CARBENES</title><author>BADDELEY, CHRISTOPHER J ; ALRASHED, ABRAR R.E ; MARIAMPILLAI, BRIAN E ; HORTON, J. HUGH ; LARREA, CHRISTIAN R ; CRUDDEN, CATHLEEN M</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CA3026196A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre</language><creationdate>2017</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25</topic><topic>NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE</topic><toplevel>online_resources</toplevel><creatorcontrib>BADDELEY, CHRISTOPHER J</creatorcontrib><creatorcontrib>ALRASHED, ABRAR R.E</creatorcontrib><creatorcontrib>MARIAMPILLAI, BRIAN E</creatorcontrib><creatorcontrib>HORTON, J. HUGH</creatorcontrib><creatorcontrib>LARREA, CHRISTIAN R</creatorcontrib><creatorcontrib>CRUDDEN, CATHLEEN M</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>BADDELEY, CHRISTOPHER J</au><au>ALRASHED, ABRAR R.E</au><au>MARIAMPILLAI, BRIAN E</au><au>HORTON, J. HUGH</au><au>LARREA, CHRISTIAN R</au><au>CRUDDEN, CATHLEEN M</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>ETCHING METAL USING N-HETEROCYCLIC CARBENES</title><date>2017-12-07</date><risdate>2017</risdate><abstract>An etchant is described that includes an N-heterocyclic carbene and optionally an appropriate solvent. The etchant was effective at etching a metallic surface having, for example, a metal oxide and/or metal, in both solution phase and vapour-phase. The etchant has been shown to effectively etch oxidized copper and tungsten.
L'invention concerne un agent de gravure comprenant un carbène N-hétérocyclique et éventuellement un solvant approprié. L'agent de gravure est efficace pour graver une surface métallique ayant, par exemple, un oxyde métallique et/ou un métal, à la fois en phase de solution et en phase vapeur. Il a été démontré que l'agent de gravure peut graver efficacement du cuivre et du tungstène oxydés.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE |
| title | ETCHING METAL USING N-HETEROCYCLIC CARBENES |
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