OPTICAL ROTATION ANGLE MEASURING SYSTEM

The present invention is directed to an optical system for measuring the rotation angle of rotatable object having a rotation shaft (2), which system comprises a reflective diffraction element (6) mounted on said shaft and a module that includes a radiation source (8) emitting a monochromatic beam (...

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Hauptverfasser: GUGGENMOS, MARKUS, VELZEL, CHRISTIAAN H.F, KIESBAUER, BERNHARD, VAN DER KLUIT, RINZE FREDERIK, HARTMANN, MARTIN, PEKELDER, SVEN
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creator GUGGENMOS, MARKUS
VELZEL, CHRISTIAAN H.F
KIESBAUER, BERNHARD
VAN DER KLUIT, RINZE FREDERIK
HARTMANN, MARTIN
PEKELDER, SVEN
description The present invention is directed to an optical system for measuring the rotation angle of rotatable object having a rotation shaft (2), which system comprises a reflective diffraction element (6) mounted on said shaft and a module that includes a radiation source (8) emitting a monochromatic beam (bo) towards this element and a radiation-sensitive detection structure (14, 16), the diffraction element is configured to project diffraction order images (18) of its pattern onto associated sections (50(1) 54(2)) of an annular grating structure forming part of the detection structure and the surface size of the diffraction element is smaller than 20% of the surface size of the annular grating structure. La présente invention concerne un système optique pour mesurer l'angle de rotation d'un objet rotatif ayant un arbre de rotation (2), lequel système comprend un élément de diffraction réfléchissant (6) monté sur ledit arbre et un module qui comporte une source de rayonnement (8) émettant un faisceau monochromatique (bo) vers ledit élément et une structure de détection sensible à un rayonnement (14, 16). L'élément de diffraction est configuré pour projeter des images d'ordre de diffraction (18) de son motif sur des sections associées (50(1)-54(2)) d'une structure de réseau annulaire faisant partie de la structure de détection, et la taille de surface de l'élément de diffraction est inférieure à 20 % de la taille de surface de la structure de réseau annulaire.
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subjects ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE
MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
PHYSICS
TARIFF METERING APPARATUS
TESTING
title OPTICAL ROTATION ANGLE MEASURING SYSTEM
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