MEMS DEVICE WITH GETTER LAYER

A MEMS device comprises a first layer (1), a second layer (2) and a third layer (3) sealed together. A mobile structure (7.1, 7.2) in the second layer (2) is defined by openings (8.1, 8.2) in the second layer (2). In the first layer ( 1), there is at least one first-layer cavity (6.1, 6.2) with an o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CUZZOCREA, JULIEN, COLLET, JOEL
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
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