LIQUID SUSPENSION AND POWDER OF CERIUM OXIDE PARTICLES, METHODS FOR MAKING THE SAME AND USES THEREOF IN POLISHING

The invention relates to a suspension of cerium oxide particles, of which the particles (secondary particles) have an average size of at most 200 nm, these secondary particles consisting of primary particles whose average size measured by TEM is of at most 150 nm with a standard deviation of at most...

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Bibliographische Detailangaben
Hauptverfasser: THIERS, LAURENT, CRINIERE, GUILLAUME
Format: Patent
Sprache:eng ; fre
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